Characterization of Spin Coated Polymers in by Beck C.E.

By Beck C.E.

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Extra resources for Characterization of Spin Coated Polymers in Nano-environments as a Function of Film Thickness

Example text

Also, the film thickness vs. 3-2). In total, spin coating and ellipsometry together provided repeatable samples and accurate measurements of film thickness. 3-2: Film thickness vs. 4 Dielectric Analysis Dielectric analysis (DEA) using both temperature and frequency sweeps can provide a direct measure of cooperativity. Because silicon is a semi-conductor, there were some concerns about consistent permittivity. The current would have to be high enough to allow the silicon wafer to conduct. The first test, then, was on a clean silicon wafer.

As discussed previously, changes in the glass transition temperature can indicate changing cooperativity. Thermal mechanical analysis (TMA) was used to survey the Tg of the system. Due to the favorable interactions of the PMMA side chains and the native oxide layer of silicon, the thinner films were expected to increase in cooperativity and therefore show an increase in Tg. The tests were started with the thickest films, 900 nm. As the system was heated, it expanded giving a constant increase in probe position.

Atomic concentration tables were generated, and in addition, element analysis of oxygen and carbon was performed on both samples. 2-3. 8V (Set point). 2-3. In addition, the difference in elevation for two specifically selected points on each polymer brush sample were measured. 1 Differential Scanning Cal orimetry Differential Scanning Calorimetry (DSC) was used to measure the Tg of PMMA. These measurements provided bulk values to compare to thin film properties. ), and a second heat. 1-1 with the Tg shown as a step.

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